Server: Netscape-Enterprise/2.01 Date: Fri, 21 Nov 1997 04:56:16 GMT Last-modified: Mon, 14 Jul 1997 23:20:48 GMT Content-length: 5263 Content-type: text/html Millipore at SEMICON West '97

   

MILLIPORE INTRODUCES NEW MASS FLOW CONTROLLER FOR PRECISE GAS REGULATION
Potential for Smaller Gas Panel Footprint

SAN FRANCISCO, July 14, 1997 – Millipore Corporation’s Microelectronics Divisions are introducing the Tylan UHP2000 Thermal Mass Flow Controller at SEMICON West ’97. This new generation of streamlined MFC is designed exclusively for difficult semiconductor processing applications, such as metal etch, silicon nitride, chemical vapor deposition (CVD) and other applications that produce condensable or particle by-products.

The Tylan UHP2000 mass flow controller is easy to use and offers greater cleanliness than its predecessors. Compact in size and lightweight, the device requires a smaller mounting surface, promoting faster installation and easier replacement. An all-metal flowpath minimizes moisture retention and provides for better corrosion resistance. The Tylan UHP2000 MFC also features laminar flow throughout with a fully swept, gas-wetted flowpath and a diaphragm sealed solenoid valve. The result is significantly faster drydown and reduced dead volume that minimizes contamination problems. It is constructed of 7 uinch Ra electropolished 316L stainless steel surface finish or corrosion resistant Hastelloy C-22.

In addition, the new Tylan UHP2000 MFC includes a digital electronics option, allowing for onboard diagnostics (i.e., predictive preventive maintenance), providing the capability for statistical process control metrices. A single device can be calibrated for as little as two gases and as many as nine.

The Tylan UHP2000 MFC offers improved mass flow control response time with its capability to address processes which involve fast chemical reactions, such as dry etch, with minimal overshoot or undershoot. It provides consistently repeatable chemistry for improved device performance characteristics and throughput.

The Tylan UHP2000 MFC technology capability is brought to Millipore Microelectronics through its 1997 acquisition of Tylan General, Inc., a leading supplier of advanced process management equipment such as flow control and vacuum measurement devices and integrated gas panels. The integration of Tylan General’s complementary technologies and resources provides Millipore with a unique opportunity to offer semiconductor manufacturers complete, value-added solutions for pure gas delivery and distribution.

Millipore Corporation is a multinational high technology company that applies its purification technologies to critical research and manufacturing problems in the microelectronics, biopharmaceutical and analytical laboratory markets. Headquartered in Bedford, Massachusetts, the company employs 4,500 people in seven manufacturing plants and more than 30 subsidiaries and sales offices around the world. Through this extensive network, Millipore sells its products in more than 100 countries. Sales for the company in 1996, totaled $619 million, with 58 percent of the revenue coming from outside of the Americas.

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Last Modified July 14, 1997
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